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Nanoimprint Lithography: Principles, Processes and Materials (Nanotechnology Science and Technology)

Nanoimprint Lithography: Principles, Processes and Materials (Nanotechnology Science and Technology)

Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nanofabrication technologies and manufacturing of Integrated Circuits (IC). This book gives fresh insight to NIL, one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures.
Country USA
Manufacturer Nova Science Pub Inc
Binding Paperback
EANs 9781611225013
ReleaseDate 0000-00-00

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