Silicon Processing for the VLSI Era, Vol. 1: Process Technology

Silicon Processing for the VLSI Era, Vol. 3: The Submicron MOSFET

Silicon Processing for the VLSI Era, Vol. 1: Process Technology

Silicon Processing for the VLSI Era, Vol. 4: Deep-Submicron Process Technology

Silicon Processing for the VLSI Era, Vol. 2: Process Integration

Fabrication Engineering at the Micro- and Nanoscale (The Oxford Series in Electrical and Computer Engineering)

Silicon VLSI Technology: Fundamentals, Practice, and Modeling

Microchip Fabrication, Sixth Edition: A Practical Guide to Semiconductor Processing

Semiconductor Material and Device Characterization

Elements of Electromagnetics (The Oxford Series in Electrical and Computer Engineering)